Inventor · disambiguated record
Christian Felix Wählisch
Also filed as: WÄHLISCH CHRISTIAN FELIX
2 granted patents·11 citations·filing 2014–2019
52Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0190US10222701B2Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 5, 2019·11 cites·21 claims
- 0256US10459342B2Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing methodASML NETHERLANDS BV·Filed 2019·Granted Oct 29, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →