Inventor · disambiguated record
Kenneth L. Starks
Also filed as: STARKS KENNETH · STARKS KENNETH L
3 granted patents·2 pending applications·5 citations·filing 2005–2019
56Inventor score
Top patents by PatentIndex Score
5 records- 0187US9859098B2Temperature controlled ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jan 2, 2018·5 cites·17 claims
- 0258US10262833B2Temperature controlled ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 16, 2019·0 cites·9 claims
- 0342US10193066B2Apparatus and techniques for anisotropic substrate etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 29, 2019·0 cites·17 claims
- 0441US2019276931A1Methods and apparatus for physical vapor deposition using directional linear scanningAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0530US2006124155A1Technique for reducing backside particlesSUURONEN DAVID E·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →