Inventor · disambiguated record
Paul Silverstein
Also filed as: SILVERSTEIN PAUL · SILVERSTEIN PAUL B
7 granted patents·4 pending applications·3 citations·filing 2017–2025
71Inventor score
Files withAXCELIS TECH INC11
Top patents by PatentIndex Score
11 records- 0177US9870893B2Multi-piece electrode apertureAXCELIS TECH INC·Filed 2017·Granted Jan 16, 2018·2 cites·18 claims
- 0267US10361069B2Ion source repeller shield comprising a labyrinth sealAXCELIS TECH INC·Filed 2017·Granted Jul 23, 2019·1 cites·20 claims
- 0366US11244800B2Stepped indirectly heated cathode with improved shieldingAXCELIS TECH INC·Filed 2021·Granted Feb 8, 2022·0 cites·21 claims
- 0463US2025277303A1Low-temperature vaporizer for ion implanter with in-vacuum controlled flowAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0563US2025188592A1High-efficiency target for an ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0660US10535498B2Lanthanated tungsten ion source and beamline componentsAXCELIS TECH INC·Filed 2018·Granted Jan 14, 2020·0 cites·14 claims
- 0755US11521821B2Ion source repellerAXCELIS TECH INC·Filed 2021·Granted Dec 6, 2022·0 cites·22 claims
- 0854US2024145213A1Wire or rod shaped extraction electrode opticsAXCELIS TECH INC·Filed 2022·Application pending·0 cites
- 0952US2017330725A1Lanthanated tungsten ion source and beamline componentsAXCELIS TECH INC·Filed 2017·Application pending·0 cites
- 1051US11545330B2Ion source with multiple bias electrodesAXCELIS TECH INC·Filed 2021·Granted Jan 3, 2023·0 cites·20 claims
- 1144US9941087B2Ion source cathode shieldAXCELIS TECH INC·Filed 2017·Granted Apr 10, 2018·0 cites·16 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →