Inventor · disambiguated record
Uwe Spengler
Also filed as: SPENGLER UWE
3 granted patents·3 citations·filing 2008–2015
58Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0169US9217930B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Dec 22, 2015·1 cites·25 claims
- 0268US8395756B2Illumination system for a microlithographic projection exposure apparatusWANGLER JOHANNES·Filed 2008·Granted Mar 12, 2013·2 cites·49 claims
- 0356US9575414B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Feb 21, 2017·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →