Inventor · disambiguated record
Thanh Pham
Also filed as: PHAM THANH · PHAM THANH N · PHAM THANH NGOC
24 granted patents·3 pending applications·2,041 citations·filing 1994–2016
97Inventor score
Top patents by PatentIndex Score
27 records- 0199US7399388B2Sequential gas flow oxide deposition techniqueAPPLIED MATERIALS INC·Filed 2003·Granted Jul 15, 2008·622 cites·28 claims
- 0296US7081414B2Deposition-selective etch-deposition process for dielectric film gapfillAPPLIED MATERIALS INC·Filed 2003·Granted Jul 25, 2006·98 cites·9 claims
- 0396US6903031B2In-situ-etch-assisted HDP deposition using SiF4 and hydrogenAPPLIED MATERIALS INC·Filed 2003·Granted Jun 7, 2005·111 cites·26 claims
- 0495US5866795ALiquid flow rate estimation and verification by direct liquid measurementAPPLIED MATERIALS INC·Filed 1997·Granted Feb 2, 1999·564 cites·24 claims
- 0593US7479304B2Gas distribution plate fabricated from a solid yttrium oxide-comprising substrateAPPLIED MATERIALS INC·Filed 2004·Granted Jan 20, 2009·42 cites·16 claims
- 0693US6110556ALid assembly for a process chamber employing asymmetric flow geometriesAPPLIED MATERIALS INC·Filed 1997·Granted Aug 29, 2000·218 cites·20 claims
- 0791US7097886B2Deposition process for high aspect ratio trenchesAPPLIED MATERIALS INC·Filed 2002·Granted Aug 29, 2006·56 cites·19 claims
- 0889US6117244ADeposition resistant lining for CVD chamberAPPLIED MATERIALS INC·Filed 1998·Granted Sep 12, 2000·93 cites·3 claims
- 0987US6511923B1Deposition of stable dielectric filmsAPPLIED MATERIALS INC·Filed 2000·Granted Jan 28, 2003·42 cites·20 claims
- 1086US7033945B2Gap filling with a composite layerAPPLIED MATERIALS INC·Filed 2004·Granted Apr 25, 2006·43 cites·17 claims
- 1182US7049211B2In-situ-etch-assisted HDP deposition using SiF4APPLIED MATERIALS INC·Filed 2005·Granted May 23, 2006·6 cites·12 claims
- 1279US7294588B2In-situ-etch-assisted HDP depositionAPPLIED MATERIALS INC·Filed 2006·Granted Nov 13, 2007·5 cites·13 claims
- 1377US7799698B2Deposition-selective etch-deposition process for dielectric film gapfillAPPLIED MATERIALS INC·Filed 2006·Granted Sep 21, 2010·4 cites·19 claims
- 1477US5968588AIn-situ liquid flow rate estimation and verification by sonic flow methodAPPLIED MATERIALS INC·Filed 1997·Granted Oct 19, 1999·50 cites·33 claims
- 1574US7691753B2Deposition-selective etch-deposition process for dielectric film gapfillAPPLIED MATERIALS INC·Filed 2006·Granted Apr 6, 2010·3 cites·18 claims
- 1673US7141138B2Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2003·Granted Nov 28, 2006·13 cites·16 claims
- 1770US5707451AMethod and apparatus for cleaning a throttle valveAPPLIED MATERIALS INC·Filed 1995·Granted Jan 13, 1998·21 cites·5 claims
- 1867US2009087615A1Corrosion-resistant gas distribution plate for plasma processing chamberSUN JENNIFER Y·Filed 2008·Application pending·0 cites
- 1963US7498268B2Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 3, 2009·1 cites·9 claims
- 2060US5871813AApparatus and method for controlling process chamber pressureAPPLIED MATERIALS INC·Filed 1997·Granted Feb 16, 1999·25 cites·20 claims
- 2154US6047713AMethod for cleaning a throttle valveAPPLIED MATERIALS INC·Filed 1994·Granted Apr 11, 2000·14 cites·28 claims
- 2247US10205038B2Photovoltaic devices including curved sub-layersPHAM THANH NGOC·Filed 2016·Granted Feb 12, 2019·0 cites·19 claims
- 2343US2018166597A1Photovoltaic Devices Including Uniform Intrinsic LayerAPTOS ENERGY LLC·Filed 2016·Application pending·0 cites
- 2439US6012600APressure responsive clamp for a processing chamberAPPLIED MATERIALS INC·Filed 1996·Granted Jan 11, 2000·10 cites·18 claims
- 2539US2004231798A1Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2638US10424687B1Methods of producing uniform intrinsic layerAPTOS ENERGY LLC·Filed 2016·Granted Sep 24, 2019·0 cites·22 claims
- 2736US9972743B1Methods of producing photoelectric devicesAPTOS ENERGY LLC·Filed 2016·Granted May 15, 2018·0 cites·19 claims
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