Inventor · disambiguated record
John M. Algots
Also filed as: ALGOTS JOHN M · ALGOTS JOHN MARTIN
23 granted patents·1,210 citations·filing 1999–2016
97Inventor score
Top patents by PatentIndex Score
23 records- 0197US6853653B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Feb 8, 2005·74 cites·32 claims
- 0297US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0397US6721340B1Bandwidth control technique for a laserCYMER INC·Filed 2000·Granted Apr 13, 2004·114 cites·4 claims
- 0497US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 0597US6192064B1Narrow band laser with fine wavelength controlCYMER INC·Filed 1999·Granted Feb 20, 2001·258 cites·19 claims
- 0696US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 0796US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 0895US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 0995US6529531B1Fast wavelength correction technique for a laserCYMER INC·Filed 2000·Granted Mar 4, 2003·86 cites·12 claims
- 1094US7217940B2Collector for EUV light sourceCYMER INC·Filed 2004·Granted May 15, 2007·60 cites·137 claims
- 1189US8144739B2System method and apparatus for selecting and controlling light source bandwidthFIGUEROA EFRAIN·Filed 2009·Granted Mar 27, 2012·21 cites·14 claims
- 1286US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 1386US6496528B2Line narrowing unit with flexural grating mountCYMER INC·Filed 2001·Granted Dec 17, 2002·31 cites·17 claims
- 1482US6650666B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Nov 18, 2003·19 cites·13 claims
- 1581US7382815B2Laser spectral engineering for lithographic processCYMER INC·Filed 2004·Granted Jun 3, 2008·14 cites·196 claims
- 1672US7139301B2Laser spectral engineering for lithographic processCYMER INC·Filed 2003·Granted Nov 21, 2006·9 cites·12 claims
- 1770US9544983B2Apparatus for and method of supplying target materialASML NETHERLANDS BV·Filed 2014·Granted Jan 10, 2017·1 cites·20 claims
- 1864US7346093B2DUV light source optical element improvementsCYMER INC·Filed 2004·Granted Mar 18, 2008·8 cites·46 claims
- 1962US7298770B2Laser spectral engineering for lithographic processCYMER INC·Filed 2004·Granted Nov 20, 2007·4 cites·58 claims
- 2056US10426020B2Droplet generator steering systemASML NETHERLANDS BV·Filed 2016·Granted Sep 24, 2019·0 cites·20 claims
- 2155US7079556B2Bandwidth control technique for a laserCYMER INC·Filed 2003·Granted Jul 18, 2006·3 cites·14 claims
- 2251USRE45249ESystem method and apparatus for selecting and controlling light source bandwidthCymer LLC·Filed 2013·Granted Nov 18, 2014·0 cites·33 claims
- 2345US9147995B2Rapidly tunable laser source assembly with long stroke grating moverDAYLIGHT SOLUTIONS INC·Filed 2013·Granted Sep 29, 2015·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →