Inventor · disambiguated record
Padmanaban Krishnaraj
Also filed as: KRISHNARAJ PADMANABAN
2 granted patents·594 citations·filing 2000–2002
71Inventor score
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0197US6450117B1Directing a flow of gas in a substrate processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·572 cites·61 claims
- 0284US6814814B2Cleaning residues from surfaces in a chamber by sputtering sacrificial substratesAPPLIED MATERIALS INC·Filed 2002·Granted Nov 9, 2004·22 cites·14 claims
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