Inventor · disambiguated record
Mario Stella
Also filed as: STELLA MARIO
3 granted patents·83 citations·filing 2000–2003
73Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0187US6550091B1Double-sided wafer edge scrubbing apparatus and method for using the sameLAM RES CORP·Filed 2000·Granted Apr 22, 2003·66 cites·17 claims
- 0269US6645052B2Method and apparatus for controlling CMP pad surface finishLAM RES CORP·Filed 2001·Granted Nov 11, 2003·12 cites·26 claims
- 0354US6939207B2Method and apparatus for controlling CMP pad surface finishLAM RES CORP·Filed 2003·Granted Sep 6, 2005·5 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →