Inventor · disambiguated record
Man Kyu Kang
Also filed as: KANG MAN-KYU
5 granted patents·1 pending application·3 citations·filing 2010–2020
62Inventor score
Top patents by PatentIndex Score
6 records- 0174US10763152B2Substrate support unit, heat treatment unit, and substrate treating apparatus including the sameSEMES CO LTD·Filed 2017·Granted Sep 1, 2020·3 cites·19 claims
- 0245US11735443B2Hot plate, substrate heat-treating apparatus including the hot plate, and method of fabricating the hot plateSEMES CO LTD·Filed 2019·Granted Aug 22, 2023·0 cites·8 claims
- 0344US11415889B2Chemical supply structure and a developing apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 16, 2022·0 cites·20 claims
- 0443US11766765B2Substrate treatment apparatusSEMES CO LTD·Filed 2019·Granted Sep 26, 2023·0 cites·13 claims
- 0540US11776826B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Granted Oct 3, 2023·0 cites·11 claims
- 0628US2010255409A1Attenuated phase-shift photomasks, method of fabricating the same and method of fabricating semiconductor using the sameKANG MAN-KYU·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →