Inventor · disambiguated record
Atsuo Katagiri
Also filed as: KATAGIRI ATSUO
1 granted patent·3 pending applications·0 citations·filing 2019–2021
7Inventor score
Technology areasH10P
Files withEBARA CORP4
Top patents by PatentIndex Score
4 records- 0142US11069563B2Method for processing substrate and substrate processing apparatusEBARA CORP·Filed 2020·Granted Jul 20, 2021·0 cites·14 claims
- 0239US2021265176A1Substrate processing apparatus and method for fabricating catalyst processing memberEBARA CORP·Filed 2021·Application pending·0 cites
- 0339US2020194285A1Catalyst used for catalyst-referred etching, processing pad provided with catalyst, and catalyst-referred etching deviceEBARA CORP·Filed 2019·Application pending·0 cites
- 0438US2021187685A1Substrate processing apparatus, substrate processing method, and substrate processing systemEBARA CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →