Inventor · disambiguated record
Kirk Ostrowski
Also filed as: OSTROWSKI KIRK · OSTROWSKI KIRK J
7 granted patents·2 pending applications·108 citations·filing 2002–2017
85Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0193US8129281B1Plasma based photoresist removal system for cleaning post ash residueCHEUNG DAVID·Filed 2005·Granted Mar 6, 2012·30 cites·16 claims
- 0287US8716143B1Plasma based photoresist removal system for cleaning post ash residueCHEUNG DAVID·Filed 2012·Granted May 6, 2014·7 cites·20 claims
- 0386US6693043B1Method for removing photoresist from low-k films in a downstream plasma systemNOVELLUS SYSTEMS INC·Filed 2002·Granted Feb 17, 2004·56 cites·36 claims
- 0482US11062897B2Metal doped carbon based hard mask removal in semiconductor fabricationLAM RES CORP·Filed 2017·Granted Jul 13, 2021·4 cites·26 claims
- 0578US8591661B2Low damage photoresist strip method for low-K dielectricsCHEUNG DAVID·Filed 2009·Granted Nov 26, 2013·7 cites·15 claims
- 0674US9564344B2Ultra low silicon loss high dose implant stripNOVELLUS SYSTEMS INC·Filed 2015·Granted Feb 7, 2017·2 cites·21 claims
- 0765US9613825B2Photoresist strip processes for improved device integritySHAVIV ROEY·Filed 2012·Granted Apr 4, 2017·2 cites·18 claims
- 0852US2011143548A1Ultra low silicon loss high dose implant stripCHEUNG DAVID·Filed 2009·Application pending·0 cites
- 0947US2014120733A1Low damage photoresist strip method for low-k dielectricsNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →