Inventor · disambiguated record
Naohiko Ujimaru
Also filed as: UJIMARU NAOHIKO
3 granted patents·7 citations·filing 2004–2009
58Inventor score
Files withPANASONIC CORP3
Top patents by PatentIndex Score
3 records- 0161US7838185B2Focus measurement method and method of manufacturing a semiconductor devicePANASONIC CORP·Filed 2009·Granted Nov 23, 2010·2 cites·17 claims
- 0257US7474382B2Method for determining focus deviation amount in pattern exposure and pattern exposure methodPANASONIC CORP·Filed 2004·Granted Jan 6, 2009·5 cites·22 claims
- 0337US7883840B2Developing method and method for fabricating semiconductor device using the developing methodPANASONIC CORP·Filed 2006·Granted Feb 8, 2011·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →