Inventor · disambiguated record
Shigekazu Kato
Also filed as: KATO SHIGEKAZU
66 granted patents·1 pending application·877 citations·filing 1990–2005
99Inventor score
Files withHITACHI LTD60AGENCY IND SCIENCE TECHN1AIWA CO1NISHIHATA KOUJI1PHOTO CATALYTIC MATERIALS INC1
Top patents by PatentIndex Score
67 records- 0193US5784799AVacuum processing apparatus for substate wafersHITACHI LTD·Filed 1997·Granted Jul 28, 1998·59 cites·8 claims
- 0293US5314509AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1991·Granted May 24, 1994·78 cites·23 claims
- 0391US5320982AWafer cooling method and apparatusHITACHI LTD·Filed 1991·Granted Jun 14, 1994·142 cites·13 claims
- 0490US5685684AVacuum processing systemHITACHI LTD·Filed 1996·Granted Nov 11, 1997·112 cites·4 claims
- 0586US6301802B1Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 16, 2001·13 cites·11 claims
- 0682US7367135B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2005·Granted May 6, 2008·2 cites·2 claims
- 0782US5553396AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1995·Granted Sep 10, 1996·24 cites·10 claims
- 0882US5349762AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1993·Granted Sep 27, 1994·28 cites·28 claims
- 0981US5078851ALow-temperature plasma processorNISHIHATA KOUJI·Filed 1990·Granted Jan 7, 1992·81 cites·8 claims
- 1080US6968630B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2004·Granted Nov 29, 2005·7 cites·2 claims
- 1179US5445484AVacuum processing systemHITACHI LTD·Filed 1993·Granted Aug 29, 1995·67 cites·5 claims
- 1277US6634116B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Oct 21, 2003·6 cites·5 claims
- 1377US6446353B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Sep 10, 2002·6 cites·37 claims
- 1476US7052151B2Photography light source deviceSTANLEY ELECTRIC CO LTD·Filed 2003·Granted May 30, 2006·14 cites·15 claims
- 1576US5950330AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1998·Granted Sep 14, 1999·16 cites·28 claims
- 1675US6314658B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2000·Granted Nov 13, 2001·5 cites·25 claims
- 1773US6886272B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2003·Granted May 3, 2005·4 cites·9 claims
- 1873US6880264B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2003·Granted Apr 19, 2005·4 cites·108 claims
- 1970US5673750AVacuum processing method and apparatusHITACHI LTD·Filed 1995·Granted Oct 7, 1997·37 cites·9 claims
- 2070US5661913AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1996·Granted Sep 2, 1997·11 cites·9 claims
- 2169US6484414B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Nov 26, 2002·3 cites·20 claims
- 2269US6473989B2Conveying system for a vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Nov 5, 2002·3 cites·9 claims
- 2365US6904699B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2004·Granted Jun 14, 2005·2 cites·4 claims
- 2465US6588121B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Jul 8, 2003·2 cites·11 claims
- 2565US6467187B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 22, 2002·2 cites·9 claims
- 2665US6467186B2Transferring device for a vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 22, 2002·2 cites·5 claims
- 2765US6460270B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Oct 8, 2002·2 cites·3 claims
- 2864US6662465B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 16, 2003·2 cites·46 claims
- 2964US6655044B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Dec 2, 2003·2 cites·23 claims
- 3064US6625899B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Sep 30, 2003·2 cites·22 claims
- 3164US6505415B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Jan 14, 2003·2 cites·44 claims
- 3264US6499229B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 31, 2002·2 cites·14 claims
- 3364US6487791B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 3, 2002·2 cites·33 claims
- 3464USD453402SVacuum processing equipment configurationHITACHI LTD·Filed 1999·Granted Feb 5, 2002·12 cites·1 claims
- 3562US5457896AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1994·Granted Oct 17, 1995·9 cites·12 claims
- 3659USD473354SVacuum processing equipment configurationHITACHI LTD·Filed 1999·Granted Apr 15, 2003·10 cites·1 claims
- 3759US6490810B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 10, 2002·1 cites·14 claims
- 3859US6470596B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 29, 2002·1 cites·19 claims
- 3959US6332280B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 25, 2001·1 cites·13 claims
- 4059US6301801B1Vacuum processing apparatus and operating method thereforFiled 2000·Granted Oct 16, 2001·1 cites·15 claims
- 4156US6108929AVacuum processing apparatusHITACHI LTD·Filed 1999·Granted Aug 29, 2000·5 cites·15 claims
- 4254US5663884AMultiprocessing apparatusHITACHI LTD·Filed 1995·Granted Sep 2, 1997·19 cites·6 claims
- 4352USRE39775EVacuum processing operating method with wafers, substrates and/or semiconductorsHITACHI LTD·Filed 2002·Granted Aug 21, 2007·3 cites·32 claims
- 4452US5448470AMultiprocessing apparatusHITACHI LTD·Filed 1992·Granted Sep 5, 1995·16 cites·5 claims
- 4551US2006275187A1Ultraviolet-response thin film photocatalyst and application thereofPHOTO CATALYTIC MATERIALS INC·Filed 2004·Application pending·0 cites
- 4650US5562820AProcess for purifying waterAGENCY IND SCIENCE TECHN·Filed 1995·Granted Oct 8, 1996·15 cites·10 claims
- 4750US5449467AProcess for purifying waterAIWA CO·Filed 1993·Granted Sep 12, 1995·15 cites·7 claims
- 4849USRE39823EVacuum processing operating method with wafers, substrates and/or semiconductorsHITACHI LTD·Filed 2002·Granted Sep 11, 2007·1 cites·9 claims
- 4949US7089680B1Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Aug 15, 2006·2 cites·24 claims
- 5048US6463678B2Substrate changing-over mechanism in a vaccum tankHITACHI LTD·Filed 2001·Granted Oct 15, 2002·0 cites·9 claims
Showing the top 50 of 67 patent records by PatentIndex Score.
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