Inventor · disambiguated record
Kazuhito Tohnoe
Also filed as: TOHNOE KAZUHITO
3 granted patents·2 pending applications·24 citations·filing 2010–2012
63Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0188US8178439B2Surface cleaning and selective deposition of metal-containing cap layers for semiconductor devicesTOHNOE KAZUHITO·Filed 2010·Granted May 15, 2012·20 cites·23 claims
- 0271US8975188B2Plasma etching methodHIRAYAMA YUSUKE·Filed 2012·Granted Mar 10, 2015·4 cites·6 claims
- 0334US2014227876A1Semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 0430US8975191B2Plasma etching methodTOHNOE KAZUHITO·Filed 2012·Granted Mar 10, 2015·0 cites·4 claims
- 0529US2012252210A1Method for modifying metal cap layers in semiconductor devicesTOHNOE KAZUHITO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →