Inventor · disambiguated record
Gregory A. Appel
Also filed as: APPEL GREGORY · APPEL GREGORY A
5 granted patents·163 citations·filing 1997–1998
82Inventor score
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5 records- 0190US6000997ATemperature regulation in a CMP processAPLEX INC·Filed 1998·Granted Dec 14, 1999·101 cites·32 claims
- 0268US6080040AWafer carrier head with inflatable bladder and attack angle control for polishingAPLEX GROUP·Filed 1997·Granted Jun 27, 2000·30 cites·20 claims
- 0350US6149512ALinear pad conditioning apparatusAPLEX INC·Filed 1997·Granted Nov 21, 2000·16 cites·19 claims
- 0447US6159083APolishing head for a chemical mechanical polishing apparatusAPLEX INC·Filed 1998·Granted Dec 12, 2000·14 cites·31 claims
- 0524US6062961AWafer polishing head driveAPLEX INC·Filed 1997·Granted May 16, 2000·2 cites·10 claims
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