Assignee
APLEX GROUP
US4 patents
Top patents by PatentIndex Score
US5980368ANov 9, 1999
Polishing tool having a sealed fluid chamber for support of polishing pad
APLEX GROUP71 citations95
US5934974AAug 10, 1999
In-situ monitoring of polishing pad wear
APLEX GROUP86 citations95
US6062959AMay 16, 2000
Polishing system including a hydrostatic fluid bearing support
APLEX GROUP42 citations94
US6080040AJun 27, 2000
Wafer carrier head with inflatable bladder and attack angle control for polishing
APLEX GROUP30 citations90