Inventor · disambiguated record
Thanh X. Nguyen
Also filed as: NGUYEN THANH · NGUYEN THANH X · NGUYEN THANH-XUAN THI · Nguyen Thanh Xuan
22 granted patents·4 pending applications·753 citations·filing 1995–2024
95Inventor score
Top patents by PatentIndex Score
26 records- 0199US5596150ACapacitance probe for fluid flow and volume measurementsUS ARMY·Filed 1995·Granted Jan 21, 1997·554 cites·13 claims
- 0294US8895450B2Low resistivity tungsten PVD with enhanced ionization and RF power couplingAPPLIED MATERIALS INC·Filed 2013·Granted Nov 25, 2014·16 cites·13 claims
- 0394US8558299B2Semiconductor device with gate electrode stack including low resistivity tungsten and method of formingCAO YONG·Filed 2011·Granted Oct 15, 2013·26 cites·4 claims
- 0493US9773665B1Particle reduction in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2016·Granted Sep 26, 2017·9 cites·20 claims
- 0589US7498818B2Apparatus and method for detecting a brush liftoff in a synchronous generator rotor circuitSCHWEITZER ENGINEERING LAB INC·Filed 2006·Granted Mar 3, 2009·16 cites·29 claims
- 0688US7804303B2Apparatus and method for detecting a brush liftoff in a synchronous generator rotor circuitSCHWEITZER ENGINEERING LAB INC·Filed 2008·Granted Sep 28, 2010·13 cites·20 claims
- 0788US5675259AMethod and apparatus for measuring fluid flowUS ARMY·Filed 1995·Granted Oct 7, 1997·89 cites·45 claims
- 0887US10043670B2Systems and methods for low resistivity physical vapor deposition of a tungsten filmAPPLIED MATERIALS INC·Filed 2015·Granted Aug 7, 2018·4 cites·11 claims
- 0986US9633824B2Target for PVD sputtering systemAPPLIED MATERIALS INC·Filed 2013·Granted Apr 25, 2017·7 cites·18 claims
- 1082US9960021B2Physical vapor deposition (PVD) target having low friction padsAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·5 cites·13 claims
- 1182US9087679B2Uniformity tuning capable ESC grounding kit for RF PVD chamberRASHEED MUHAMMAD M·Filed 2012·Granted Jul 21, 2015·5 cites·20 claims
- 1276US9633839B2Methods for depositing dielectric films via physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2015·Granted Apr 25, 2017·2 cites·19 claims
- 1375US9340866B2Substrate support with radio frequency (RF) return pathRITCHIE ALAN·Filed 2012·Granted May 17, 2016·3 cites·20 claims
- 1474US10734235B2Systems and methods for low resistivity physical vapor deposition of a tungsten filmAPPLIED MATERIALS INC·Filed 2018·Granted Aug 4, 2020·1 cites·7 claims
- 1570US12449097B1Hydrogen fuel storage deviceTRAN QUYEN DINH·Filed 2024·Granted Oct 21, 2025·0 cites·12 claims
- 1665US9928997B2Apparatus for PVD dielectric depositionAPPLIED MATERIALS INC·Filed 2015·Granted Mar 27, 2018·1 cites·18 claims
- 1764US9281167B2Variable radius dual magnetronAPPLIED MATERIALS INC·Filed 2013·Granted Mar 8, 2016·1 cites·19 claims
- 1863US11056325B2Methods and apparatus for substrate edge uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Jul 6, 2021·0 cites·20 claims
- 1963US8580094B2Magnetron design for RF/DC physical vapor depositionWANG RONGJUN·Filed 2011·Granted Nov 12, 2013·1 cites·15 claims
- 2062US2025003065A1Method and apparatus for gas and vapor deposition precursor delivery heaterLAM RES CORP·Filed 2022·Application pending·0 cites
- 2159US10096455B2Extended dark space shieldAPPLIED MATERIALS INC·Filed 2014·Granted Oct 9, 2018·0 cites·9 claims
- 2256US2014110248A1Chamber pasting method in a pvd chamber for reactive re-sputtering dielectric materialAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2344US10886113B2Process kit and method for processing a substrateAPPLIED MATERIALS INC·Filed 2017·Granted Jan 5, 2021·0 cites·20 claims
- 2443US10199204B2Target retaining apparatusAPPLIED MATERIALS INC·Filed 2015·Granted Feb 5, 2019·0 cites·20 claims
- 2542US2019105097A1Methods and apparatus for tattoo removalNGUYEN THANH X·Filed 2017·Application pending·0 cites
- 2641US2012027954A1Magnet for physical vapor deposition processes to produce thin films having low resistivity and non-uniformityLIU ZHENDONG·Filed 2011·Application pending·0 cites
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