Inventor · disambiguated record
Matt Cheng-Hsiung Tsai
Also filed as: TSAI MATT · TSAI MATT CHENG-HSIUNG
4 granted patents·14 citations·filing 1997–2014
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0171US9064911B2Heated cooling plate for E-chucks and pedestalsROY SHAMBHU N·Filed 2009·Granted Jun 23, 2015·4 cites·17 claims
- 0263US8721796B2Plasma cleaning apparatus and methodDEEHAN MARTIN·Filed 2009·Granted May 13, 2014·3 cites·9 claims
- 0353US9552968B2Plasma cleaning apparatus and methodAPPLIED MATERIALS INC·Filed 2014·Granted Jan 24, 2017·0 cites·15 claims
- 0433US5990453AHigh pressure/high temperature process chamberAPPLIED MATERIALS INC·Filed 1997·Granted Nov 23, 1999·7 cites·22 claims
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