Inventor · disambiguated record
Yoshiharu Kishida
Also filed as: KISHIDA YOSHIHARU
2 granted patents·3 citations·filing 2009–2017
42Inventor score
Top patents by PatentIndex Score
2 records- 0166US10665430B2Gas supply system, substrate processing system and gas supply methodTOKYO ELECTRON LTD·Filed 2017·Granted May 26, 2020·1 cites·15 claims
- 0259US8069704B2Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structureISHIBASHI KIYOTAKA·Filed 2009·Granted Dec 6, 2011·2 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →