Inventor · disambiguated record
Masayuki Kamezawa
Also filed as: KAMEZAWA MASAYUKI
2 granted patents·4 pending applications·23 citations·filing 2002–2008
60Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0169US7578886B2Substrate processing apparatus, substrate processing method, and substrate holding apparatusEBARA CORP·Filed 2004·Granted Aug 25, 2009·14 cites·35 claims
- 0265US7476290B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2003·Granted Jan 13, 2009·9 cites·13 claims
- 0352US2009090397A1Substrate processing apparatus and substrate processing methodSAITO TAKAYUKI·Filed 2008·Application pending·0 cites
- 0448US2008017220A1Apparatus for cleaning a substrate having metal interconnectsKODERA MASAKO·Filed 2007·Application pending·0 cites
- 0540US2004177655A1Apparatus for cleaning a substrate having metal interconnectsFiled 2004·Application pending·0 cites
- 0633US2004216841A1Substrate processing apparatusFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →