Inventor · disambiguated record

Michael F. Hegarty

Also filed as: HEGARTY MICHAEL F

1 granted patent·37 citations·filing 2006–2006

46Inventor score

Technology areasH10P

Files withAPPLIED MATERIALS INC1

Top patents by PatentIndex Score

1 record

0193US7436645B2Method and apparatus for controlling temperature of a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Oct 14, 2008·37 cites·14 claims

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