Inventor · disambiguated record
Tolga Ergin
Also filed as: ERGIN TOLGA · ERGIN TOLGA MEHMET
6 granted patents·1 pending application·2 citations·filing 2017–2024
66Inventor score
Top patents by PatentIndex Score
7 records- 0168US10327318B2Adjusting a beam diameter and an aperture angle of a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2017·Granted Jun 18, 2019·2 cites·20 claims
- 0255US12171054B2EUV light source with a beam positioning deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Granted Dec 17, 2024·0 cites·15 claims
- 0355US11675202B2Reflective optical element, beam guiding device and EUV-beam generating deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted Jun 13, 2023·0 cites·10 claims
- 0455US2025105577A1Apparatus for correcting astigmatism of a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 0550US11835699B2Focusing device and EUV radiation generating device having sameTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted Dec 5, 2023·0 cites·11 claims
- 0636US12007693B2Laser focussing moduleASML NETHERLANDS BV·Filed 2020·Granted Jun 11, 2024·0 cites·18 claims
- 0735US11304286B2PolarizerTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted Apr 12, 2022·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →