Inventor · disambiguated record
David Hetzer
Also filed as: HETZER DAVID
6 granted patents·2 pending applications·28 citations·filing 2001–2023
78Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
8 records- 0184US7567353B2Automated process control using optical metrology and photoresist parametersTOKYO ELECTRON LTD·Filed 2007·Granted Jul 28, 2009·10 cites·24 claims
- 0274US8975009B2Track processing to remove organic films in directed self-assembly chemo-epitaxy applicationsTOKYO ELECTRON LTD·Filed 2014·Granted Mar 10, 2015·3 cites·16 claims
- 0371US7949618B2Training a machine learning system to determine photoresist parametersTOKYO ELECTRON LTD·Filed 2007·Granted May 24, 2011·10 cites·19 claims
- 0471US7728976B2Determining photoresist parameters using optical metrologyTOKYO ELECTRON LTD·Filed 2007·Granted Jun 1, 2010·4 cites·21 claims
- 0564US9086631B2EUV resist sensitivity reductionTOKYO ELECTRON LTD·Filed 2013·Granted Jul 21, 2015·1 cites·19 claims
- 0653US2024421009A1Systems and methods for determining a fluid height and/or a fluid velocity on a spinning substrateTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0738US10354872B2High-precision dispense system with meniscus controlTOKYO ELECTRON LTD·Filed 2017·Granted Jul 16, 2019·0 cites·18 claims
- 0836US2002080158A1Offline data collectionFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →