Inventor · disambiguated record
Ming-Shiou Kuo
Also filed as: KUO MING-SHIOU
7 granted patents·1 pending application·15 citations·filing 2011–2022
78Inventor score
Top patents by PatentIndex Score
8 records- 0187US10190209B2PVD apparatus and method with deposition chamber having multiple targets and magnetsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 29, 2019·4 cites·20 claims
- 0281US9716044B2Interlayer dielectric structure with high aspect ratio process (HARP)CHANG JEN-CHI·Filed 2011·Granted Jul 25, 2017·6 cites·20 claims
- 0364US8953298B2Electrostatic chuck robotic systemKAO CHUNG-EN·Filed 2011·Granted Feb 10, 2015·2 cites·20 claims
- 0461US9708706B2PVD apparatus and method with deposition chamber having multiple targets and magnetsKAO CHUNG-EN·Filed 2011·Granted Jul 18, 2017·1 cites·20 claims
- 0558US8624394B2Integrated technology for partial air gap low K depositionCHANG HUNG JUI·Filed 2011·Granted Jan 7, 2014·2 cites·15 claims
- 0649US8916480B2Chemical vapor deposition film profile uniformity controlKUO MING-SHIOU·Filed 2011·Granted Dec 23, 2014·0 cites·16 claims
- 0748US2023138317A1Substrate process system including a cooling stationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0840US10043892B2Method for manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 7, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →