Inventor · disambiguated record
Jong-Woo Sun
Also filed as: SUN JONG-WOO
21 granted patents·6 pending applications·33 citations·filing 2007–2025
91Inventor score
Files withSAMSUNG ELECTRONICS CO LTD27
Top patents by PatentIndex Score
27 records- 0194US11501987B2Loadlock module and semiconductor manufacturing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Nov 15, 2022·3 cites·17 claims
- 0291US10395900B2Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Aug 27, 2019·7 cites·12 claims
- 0386US10790122B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 29, 2020·4 cites·20 claims
- 0485US10964578B2Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 30, 2021·4 cites·20 claims
- 0584US7629589B2Apparatus and method for controlling ion beamSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Dec 8, 2009·7 cites·30 claims
- 0683US11037766B2Substrate support apparatus and plasma processing apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jun 15, 2021·3 cites·18 claims
- 0779US10971382B2Loadlock module and semiconductor manufacturing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 6, 2021·2 cites·18 claims
- 0874US11018046B2Substrate processing apparatus including edge ringSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted May 25, 2021·1 cites·13 claims
- 0972US10753800B2Calibrator of an optical emission spectroscopySAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 25, 2020·1 cites·20 claims
- 1069US2025149301A1Plasma processing apparatus including gas distribution plateSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 1169US2023033091A1Plasma processing apparatus including gas distribution plateSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1265US10748749B1Plasma monitoring apparatus, and plasma processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 18, 2020·1 cites·19 claims
- 1364US11521866B2Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 1463US11437264B2Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Sep 6, 2022·0 cites·10 claims
- 1562US11437222B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Sep 6, 2022·0 cites·20 claims
- 1661US11837496B2Substrate processing apparatus and method of processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·5 claims
- 1760US10903053B2Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 26, 2021·0 cites·14 claims
- 1857US11037806B2Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jun 15, 2021·0 cites·20 claims
- 1954US2019304751A1Plasma processing apparatus including gas distribution plateSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 2049US10825666B2Plasma monitoring apparatus and plasma processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Nov 3, 2020·0 cites·20 claims
- 2146US11289309B2Device for providing gas to a plasma chamber and a plasma processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 29, 2022·0 cites·19 claims
- 2244US11521836B2Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Dec 6, 2022·0 cites·18 claims
- 2344US11282678B2Method of controlling uniformity of plasma and plasma processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 22, 2022·0 cites·20 claims
- 2441US10062550B2Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Aug 28, 2018·0 cites·20 claims
- 2540US2019148119A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 2635US2017301578A1Focus ring assembly and a method of processing a substrate using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
- 2735US2015359079A1Etching Apparatus Using Inductively Coupled PlasmaSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →