Inventor · disambiguated record
Yoshihiro Anan
Also filed as: ANAN YOSHIHIRO
6 granted patents·1 pending application·48 citations·filing 2002–2022
80Inventor score
Top patents by PatentIndex Score
7 records- 0190US7022986B2Apparatus and method for wafer pattern inspectionHITACHI HIGH TECH CORP·Filed 2002·Granted Apr 4, 2006·30 cites·14 claims
- 0287US7982188B2Apparatus and method for wafer pattern inspectionHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 19, 2011·9 cites·18 claims
- 0381US9752997B2Charged-particle-beam analysis device and analysis methodHITACHI LTD·Filed 2014·Granted Sep 5, 2017·4 cites·15 claims
- 0474US9601308B2Spectroscopic element and charged particle beam device using the sameHITACHI LTD·Filed 2012·Granted Mar 21, 2017·3 cites·11 claims
- 0564US8481932B2Charged particle beam analyzer and analysis methodANAN YOSHIHIRO·Filed 2012·Granted Jul 9, 2013·2 cites·11 claims
- 0658US2025231124A1Inspection device, inspection element, and inspection methodHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0738US10627354B2Substitution site measuring equipment and substitution site measuring methodHITACHI LTD·Filed 2016·Granted Apr 21, 2020·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →