Inventor · disambiguated record
Heinrich Hennhofer
Also filed as: HENNHOEFER HEINRICH · HENNHOFER HEINRICH
3 granted patents·1 pending application·140 citations·filing 1997–2001
76Inventor score
Files withWACKER SILTRONIC HALBLEITERMAT3
Top patents by PatentIndex Score
4 records- 0183US6530826B2Process for the surface polishing of silicon wafersWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Mar 11, 2003·35 cites·11 claims
- 0278US6095898AProcess and device for polishing semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Aug 1, 2000·51 cites·10 claims
- 0378US5980361AMethod and device for polishing semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Nov 9, 1999·54 cites·12 claims
- 0424US2002187639A1Process for treating a polished semiconductor water immediately after the semiconductor wafer has been polishedFiled 1998·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →