Inventor · disambiguated record

Don Person

Also filed as: PERSON DON

1 granted patent·0 citations·filing 2015–2015

1Inventor score

Technology areasH10P

Files withNUVOSON INC1

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0122US9947531B2High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductorsNUVOSON INC·Filed 2015·Granted Apr 17, 2018·0 cites·14 claims

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