Inventor · disambiguated record
Nobuhiko Yabu
Also filed as: YABU NOBUHIKO
5 granted patents·1 pending application·7 citations·filing 2008–2015
69Inventor score
Top patents by PatentIndex Score
6 records- 0179US9891525B2Exposure method, exposure apparatus, and article manufacturing methodCANON KK·Filed 2015·Granted Feb 13, 2018·3 cites·12 claims
- 0270US7961295B2Exposure apparatus, measurement method, stabilization method, and device fabrication methodCANON KK·Filed 2009·Granted Jun 14, 2011·3 cites·20 claims
- 0354US8625069B2Exposure apparatus and method of manufacturing deviceYABU NOBUHIKO·Filed 2008·Granted Jan 7, 2014·1 cites·9 claims
- 0448US8163467B2Dummy light-exposed substrate, method of manufacturing the same, immersion exposure apparatus, and device manufacturing methodKITAMURA TSUYOSHI·Filed 2009·Granted Apr 24, 2012·0 cites·5 claims
- 0544US2009153828A1Exposure apparatus, exposure method, and device fabrication methodCANON KK·Filed 2008·Application pending·0 cites
- 0643US9229312B2Exposure apparatus, measurement method, stabilization method, and device fabrication methodYABU NOBUHIKO·Filed 2011·Granted Jan 5, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →