Inventor · disambiguated record
Vincent Vezin
Also filed as: VEZIN VINCENT
5 granted patents·3 pending applications·101 citations·filing 1999–2005
79Inventor score
Top patents by PatentIndex Score
8 records- 0187US6548112B1Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamberTOKYO ELECTRON LTD·Filed 1999·Granted Apr 15, 2003·76 cites·10 claims
- 0272US6893953B2Fabrication process of a semiconductor device including a CVD process of a metal filmTOKYO ELECTRON LTD·Filed 2001·Granted May 17, 2005·16 cites·29 claims
- 0367US7750654B2Probe method, prober, and electrode reducing/plasma-etching processing mechanismOCTEC INC·Filed 2005·Granted Jul 6, 2010·5 cites·27 claims
- 0458US7323220B2Gas phase growth system, method of operating the system, and vaporizer for the systemTOKYO ELECTRON LTD·Filed 2004·Granted Jan 29, 2008·3 cites·5 claims
- 0544US2005260846A1Substrate processing method, semiconductor device production method, and semiconductor deviceKONDOH EIICHI·Filed 2005·Application pending·0 cites
- 0643US7476619B2Semiconductor deviceTOKYO ELECTRON LTD·Filed 2003·Granted Jan 13, 2009·1 cites·21 claims
- 0743US2002017246A1Gas phase growth system, method of operating the system, and vaporizer for the systemTOKYO ELECTRON LTD·Filed 2001·Application pending·0 cites
- 0838US2005158477A1Deposition apparatus and a deposition method using medium in a supercritical stateEIICHI KONDOH·Filed 2004·Application pending·0 cites
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