Inventor · disambiguated record
Shiro Koyama
Also filed as: KOYAMA SHIRO
5 granted patents·369 citations·filing 1991–1994
84Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0192US5625526AElectrostatic chuckTOKYO ELECTRON LTD·Filed 1994·Granted Apr 29, 1997·193 cites·9 claims
- 0290US5665167APlasma treatment apparatus having a workpiece-side electrode grounding circuitTOKYO ELECTRON LTD·Filed 1994·Granted Sep 9, 1997·134 cites·13 claims
- 0352US5320704APlasma etching apparatusTOKYO ELECTRON LTD·Filed 1991·Granted Jun 14, 1994·23 cites·19 claims
- 0450US5474643APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Dec 12, 1995·10 cites·6 claims
- 0549US5236556APlasma apparatusTOKYO ELECTRON LTD·Filed 1991·Granted Aug 17, 1993·9 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →