Inventor · disambiguated record
Chung-Ho Huang
Also filed as: HUANG CHUNG-HO
32 granted patents·3 pending applications·213 citations·filing 2000–2024
96Inventor score
Top patents by PatentIndex Score
35 records- 0190US7672747B2Recipe-and-component control module and methods thereofLAM RES CORP·Filed 2007·Granted Mar 2, 2010·16 cites·15 claims
- 0285US8010483B2Component-tracking system and methods thereforLAM RES CORP·Filed 2010·Granted Aug 30, 2011·10 cites·18 claims
- 0385US7565220B2Targeted data collection architectureLAM RES CORP·Filed 2006·Granted Jul 21, 2009·17 cites·28 claims
- 0484US8000827B2Processing information management system in a plasma processing toolLAM RES CORP·Filed 2010·Granted Aug 16, 2011·12 cites·20 claims
- 0584US6526355B1Integrated full wavelength spectrometer for wafer processingLAM RES CORP·Filed 2000·Granted Feb 25, 2003·23 cites·6 claims
- 0683US6825050B2Integrated stepwise statistical process control in a plasma processing systemLAM RES CORP·Filed 2002·Granted Nov 30, 2004·18 cites·20 claims
- 0782US7356580B1Plug and play sensor integration for a process moduleLAM RES CORP·Filed 2000·Granted Apr 8, 2008·37 cites·11 claims
- 0881US8185242B2Dynamic alignment of wafers using compensation values obtained through a series of wafer movementsWONG SCOTT·Filed 2008·Granted May 22, 2012·11 cites·22 claims
- 0978US12072689B2Model-based scheduling for substrate processing systemsLAM RES CORP·Filed 2020·Granted Aug 27, 2024·1 cites·55 claims
- 1078US9927798B2Mobile connectivity and control of semiconductor manufacturing equipmentLAM RES CORP·Filed 2015·Granted Mar 27, 2018·3 cites·18 claims
- 1176US8906163B2Methods and apparatus for integrating and controlling a plasma processing systemHUANG CHUNG-HO·Filed 2010·Granted Dec 9, 2014·3 cites·20 claims
- 1274US6622286B1Integrated electronic hardware for wafer processing control and diagnosticLAM RES CORP·Filed 2000·Granted Sep 16, 2003·20 cites·10 claims
- 1371US8480913B2Plasma processing method and apparatus with control of plasma excitation powerNI TUQIANG·Filed 2011·Granted Jul 9, 2013·2 cites·50 claims
- 1471US2025044775A1Model-based scheduling for substrate processing systemsLAM RES CORP·Filed 2024·Application pending·0 cites
- 1570US7814046B2Dynamic component-tracking system and methods thereforLAM RES CORP·Filed 2006·Granted Oct 12, 2010·4 cites·18 claims
- 1669US7899627B2Automatic dynamic baseline creation and adjustmentLAM RES CORP·Filed 2006·Granted Mar 1, 2011·3 cites·20 claims
- 1769US6855567B1Etch endpoint detectionLAM RES CORP·Filed 2000·Granted Feb 15, 2005·13 cites·15 claims
- 1868US10747210B2System and method for automating user interaction for semiconductor manufacturing equipmentLAM RES CORP·Filed 2018·Granted Aug 18, 2020·1 cites·33 claims
- 1966US7536538B1Cluster tools for processing substrates using at least a key fileLAM RES CORP·Filed 2008·Granted May 19, 2009·4 cites·20 claims
- 2063US9871759B2Social network service for semiconductor manufacturing equipment and usersLAM RES CORP·Filed 2015·Granted Jan 16, 2018·1 cites·17 claims
- 2161US8295963B2Methods for performing data management for a recipe-and-component control moduleHUANG CHUNG-HO·Filed 2010·Granted Oct 23, 2012·1 cites·17 claims
- 2260US7162317B2Methods and apparatus for configuring plasma cluster toolsLAM RES CORP·Filed 2005·Granted Jan 9, 2007·1 cites·7 claims
- 2358US7469195B2Integrated stepwise statistical process control in a plasma processing systemLAM RES CORP·Filed 2004·Granted Dec 23, 2008·3 cites·31 claims
- 2456US8983631B2Arrangement for identifying uncontrolled events at the process module level and methods thereofHUANG CHUNG HO·Filed 2009·Granted Mar 17, 2015·2 cites·20 claims
- 2556US7228257B1Architecture for general purpose programmable semiconductor processing system and methods thereforLAM RES CORP·Filed 2003·Granted Jun 5, 2007·5 cites·24 claims
- 2655US7882076B2Primary server architectural networking arrangement and methods thereforLAM RES CORP·Filed 2006·Granted Feb 1, 2011·1 cites·18 claims
- 2755US7353379B2Methods for configuring a plasma cluster toolLAM RES CORP·Filed 2005·Granted Apr 1, 2008·1 cites·20 claims
- 2854US12181849B2Control of semiconductor manufacturing equipment in mixed reality environmentsLAM RES CORP·Filed 2022·Granted Dec 31, 2024·0 cites·30 claims
- 2946US12387134B2Data capture and transformation to support data analysis and machine learning for substrate manufacturing systemsLAM RES CORP·Filed 2020·Granted Aug 12, 2025·0 cites·20 claims
- 3045US2009089024A1Methods and arrangement for creating models for fine-tuning recipesHUANG CHUNG-HO·Filed 2008·Application pending·0 cites
- 3141US7542820B2Methods and arrangement for creating recipes using best-known methodsLAM RES CORP·Filed 2006·Granted Jun 2, 2009·0 cites·29 claims
- 3241US2002139477A1Plasma processing method and apparatus with control of plasma excitation powerLAM RES CORP·Filed 2001·Application pending·0 cites
- 3340US9736135B2Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing toolLAM RES CORP·Filed 2014·Granted Aug 15, 2017·0 cites·20 claims
- 3439US11429409B2Software emulator for hardware components in a gas delivery system of substrate processing systemLAM RES CORP·Filed 2018·Granted Aug 30, 2022·0 cites·26 claims
- 3539US7558641B2Recipe report card framework and methods thereofLAM RES CORP·Filed 2007·Granted Jul 7, 2009·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →