Inventor · disambiguated record
Lydia J. Young
Also filed as: YOUNG LYDIA · YOUNG LYDIA J
14 granted patents·953 citations·filing 1987–2008
94Inventor score
Top patents by PatentIndex Score
14 records- 0196US5851294AGas injection system for semiconductor processingWATKINS JOHNSON CO·Filed 1997·Granted Dec 22, 1998·621 cites·22 claims
- 0291US7072034B2Systems and methods for inspection of specimen surfacesKLA TENCOR CORP·Filed 2001·Granted Jul 4, 2006·48 cites·75 claims
- 0388US8025542B2Method of performing an operation with rheological compoundPHOTON DYNAMICS INC·Filed 2007·Granted Sep 27, 2011·15 cites·29 claims
- 0487US5903106APlasma generating apparatus having an electrostatic shieldWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted May 11, 1999·82 cites·49 claims
- 0585US4885472ASilicon grid as a reference and calibration standard in a particle beam lithography systemPERKIN ELMER CORP·Filed 1988·Granted Dec 5, 1989·35 cites·11 claims
- 0680US8728589B2Laser decal transfer of electronic materialsAUYEUNG RAYMOND·Filed 2008·Granted May 20, 2014·13 cites·28 claims
- 0774US4837443AGuard ring for a differentially pumped seal apparatusPERKIN ELMER CORP·Filed 1987·Granted Jun 6, 1989·26 cites·8 claims
- 0874US4818838AApparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systemsPERKIN ELMER CORP·Filed 1988·Granted Apr 4, 1989·42 cites·14 claims
- 0969US5012104AThermally stable magnetic deflection assembly and method of making sameETEC SYSTEMS INC·Filed 1990·Granted Apr 30, 1991·21 cites·11 claims
- 1063US5838006AConical baffle for reducing charging drift in a particle beam systemETEC SYSTEMS INC·Filed 1996·Granted Nov 17, 1998·16 cites·18 claims
- 1159US5136166ATemperature stable magnetic deflection assemblyETEC SYSTEMS INC·Filed 1991·Granted Aug 4, 1992·13 cites·10 claims
- 1255US4956024ANon-contacting method of cleaning surfaces with a planoar gas bearingPERKIN ELMER CORP·Filed 1989·Granted Sep 11, 1990·14 cites·20 claims
- 1347US4792688ADifferentially pumped seal apparatusPERKIN ELMER CORP·Filed 1987·Granted Dec 20, 1988·6 cites·5 claims
- 1432US4966787AMethod of creating isolated plates on the inside surface of a metallized substratePERKIN ELMER CORP·Filed 1989·Granted Oct 30, 1990·1 cites·9 claims
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