Inventor · disambiguated record
Antonie Ellert Duisterwinkel
Also filed as: DUISTERWINKEL ANTONIE ELLERT
2 granted patents·1 pending application·64 citations·filing 2001–2009
57Inventor score
Top patents by PatentIndex Score
3 records- 0191US6724460B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objectsASML NETHERLANDS BV·Filed 2001·Granted Apr 20, 2004·64 cites·13 claims
- 0251US11549180B2Apparatus and method for atomic layer depositionMAAS DIEDERIK JAN·Filed 2009·Granted Jan 10, 2023·0 cites·20 claims
- 0350US2004227102A1Method and device for measuring contamination of a surface of a component of a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →