Inventor · disambiguated record
Koh Fuwa
Also filed as: FUWA KOH
5 granted patents·2 pending applications·137 citations·filing 2000–2020
80Inventor score
Top patents by PatentIndex Score
7 records- 0189US6768627B1Electrostatic chuck and processing apparatus for insulative substrateTOTO LTD·Filed 2000·Granted Jul 27, 2004·63 cites·25 claims
- 0284US6781812B2Chuck equipmentULVAC CORP·Filed 2001·Granted Aug 24, 2004·44 cites·11 claims
- 0383US7209339B2Electrostatic chuck for an electrically insulative substrate, and a method of using sameTOTO LTD·Filed 2004·Granted Apr 24, 2007·30 cites·19 claims
- 0444US10568607B2Device, method of manufacturing the device, and method of manufacturing array type of ultrasound probeULVAC INC·Filed 2017·Granted Feb 25, 2020·0 cites·4 claims
- 0541US2011089141A1Method for the production of multi-stepped substrateULVAC INC·Filed 2009·Application pending·0 cites
- 0640US10982323B2Conductive thin film manufacturing methodULVAC INC·Filed 2020·Granted Apr 20, 2021·0 cites·8 claims
- 0736US2014158301A1Vacuum processing device and vacuum processing methodULVAC INC·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →