Inventor · disambiguated record
Kevin T. Ryan
Also filed as: RYAN KEVIN · RYAN KEVIN T · RYAN KEVIN THOMAS
7 granted patents·3 pending applications·151 citations·filing 1999–2023
85Inventor score
Top patents by PatentIndex Score
10 records- 0195US6305316B1Integrated power oscillator RF source of plasma immersion ion implantation systemAXCELIS TECH INC·Filed 2000·Granted Oct 23, 2001·67 cites·19 claims
- 0279US10925146B1Ion source chamber with embedded heaterAPPLIED MATERIALS INC·Filed 2019·Granted Feb 16, 2021·3 cites·19 claims
- 0378US6794664B1Umbilical cord facilities connection for an ion beam implanterAXCELIS TECH INC·Filed 2003·Granted Sep 21, 2004·23 cites·33 claims
- 0469US6347919B1Wafer processing chamber having separable upper and lower halvesEATON CORP·Filed 1999·Granted Feb 19, 2002·35 cites·59 claims
- 0561US11948781B2Apparatus and system including high angle extraction opticsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 2, 2024·0 cites·20 claims
- 0659US6429139B1Serial wafer handling mechanismEATON CORP·Filed 1999·Granted Aug 6, 2002·23 cites·34 claims
- 0758US12106943B2Substrate halo arrangement for improved process uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Oct 1, 2024·0 cites·9 claims
- 0858US2025157833A1Cold plate for trapping etching and deposition byproductsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0946US2023197422A1Fastening assembly for beam blocker in ion processing apparatusAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1036US2004079289A1Electrostatic chuck wafer port and top plate with edge shielding and gas scavengingFiled 2002·Application pending·0 cites
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