Inventor · disambiguated record
Johannes F. M. Westendorp
Also filed as: WESTENDORP JOHANNES · WESTENDORP JOHANNES F M
8 granted patents·1,325 citations·filing 1991–2001
91Inventor score
Top patents by PatentIndex Score
8 records- 0197US6410433B1Thermal CVD of TaN films from tantalum halide precursorsTOKYO ELECTRON LTD·Filed 1999·Granted Jun 25, 2002·374 cites·18 claims
- 0297US6265311B1PECVD of TaN films from tantalum halide precursorsTOKYO ELECTRON LTD·Filed 1999·Granted Jul 24, 2001·419 cites·21 claims
- 0394US5167761AMethod for halide etching in the presence of water of semi-conductor substratesASM INT·Filed 1991·Granted Dec 1, 1992·352 cites·7 claims
- 0489US6268288B1Plasma treated thermal CVD of TaN films from tantalum halide precursorsTOKYO ELECTRON LTD·Filed 1999·Granted Jul 31, 2001·109 cites·38 claims
- 0568US6410432B1CVD of integrated Ta and TaNx films from tantalum halide precursorsTOKYO ELECTRON LTD·Filed 1999·Granted Jun 25, 2002·36 cites·20 claims
- 0652US6143144AMethod for etch rate enhancement by background oxygen control in a soft etch systemTOKYO ELECTRONLTD·Filed 1999·Granted Nov 7, 2000·22 cites·27 claims
- 0749US6900129B2CVD of tantalum and tantalum nitride films from tantalum halide precursorsTOKYO ELECTRON LTD·Filed 2001·Granted May 31, 2005·2 cites·79 claims
- 0844US6413860B1PECVD of Ta films from tanatalum halide precursorsTOKYO ELECTRON LTD·Filed 1999·Granted Jul 2, 2002·11 cites·16 claims
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