Inventor · disambiguated record
Dieter Zernickel
Also filed as: ZERNICKEL DIETER
6 granted patents·2 pending applications·225 citations·filing 1997–2014
85Inventor score
Technology areasH10P
Files withCENTROTHERM PHOTOVOLTAICS AG3MATTSON TECH INC1MATTSON TECHNOLOGY CORP1STEAG AST1STEAG RTP SYSTEMS1
Top patents by PatentIndex Score
8 records- 0186US6005226ARapid thermal processing (RTP) system with gas driven rotating substrateSTEAG RTP SYSTEMS·Filed 1997·Granted Dec 21, 1999·121 cites·26 claims
- 0275US7037797B1Localized heating and cooling of substratesMATTSON TECH INC·Filed 2000·Granted May 2, 2006·27 cites·33 claims
- 0364US6449428B2Gas driven rotating susceptor for rapid thermal processing (RTP) systemMATTSON TECHNOLOGY CORP·Filed 1998·Granted Sep 10, 2002·38 cites·11 claims
- 0460US5870526AInflatable elastomeric element for rapid thermal processing (RTP) systemSTEAG AST·Filed 1997·Granted Feb 9, 1999·28 cites·21 claims
- 0546US10024719B2Measurement object, method for the production thereof and device for the thermal treatment of substratesCENTROTHERM PHOTOVOLTAICS AG·Filed 2014·Granted Jul 17, 2018·0 cites·10 claims
- 0642US6752625B1Method and apparatus device for the heat treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 1999·Granted Jun 22, 2004·11 cites·12 claims
- 0739US2009133628A1Vacuum device for continuous processing of substratesCENTROTHERM PHOTOVOLTAICS AG·Filed 2008·Application pending·0 cites
- 0833US2016111319A1Retainer, Method For Producing Same And Use ThereofCENTROTHERM PHOTOVOLTAICS AG·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →