Inventor · disambiguated record
Shingo Maku
Also filed as: MAKU SHINGO
3 granted patents·53 citations·filing 2003–2005
71Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0185US7094708B2Method of CVD for forming silicon nitride film on substrateTOKYO ELECTRON LTD·Filed 2004·Granted Aug 22, 2006·38 cites·15 claims
- 0278US7509962B2Method and control system for treating a hafnium-based dielectric processing systemTOKYO ELECTRON LTD·Filed 2005·Granted Mar 31, 2009·7 cites·26 claims
- 0364US7125812B2CVD method and device for forming silicon-containing insulation filmTOKYO ELECTRON LTD·Filed 2003·Granted Oct 24, 2006·8 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →