Inventor · disambiguated record
Junzo Azuma
Also filed as: AZUMA JUNZO
9 granted patents·217 citations·filing 2000–2019
87Inventor score
Files withHITACHI LTD2HITACHI ULSI SYS CO LTD2HITACHI HIGH TECH CORP1HITACHI HIGH TECH SCIENCE CORP1KAGA HIROYASU1
Top patents by PatentIndex Score
9 records- 0198US6734687B1Apparatus for detecting defect in device and method of detecting defectHITACHI LTD·Filed 2000·Granted May 11, 2004·134 cites·10 claims
- 0292US6960765B2Probe driving method, and probe apparatusHITACHI ULSI SYS CO LTD·Filed 2001·Granted Nov 1, 2005·50 cites·7 claims
- 0379US7301146B2Probe driving method, and probe apparatusHITACHI LTD·Filed 2005·Granted Nov 27, 2007·8 cites·16 claims
- 0478US6970004B2Apparatus for inspecting defects of devices and method of inspecting defectsHITACHI ULSI SYS CO LTD·Filed 2004·Granted Nov 29, 2005·18 cites·8 claims
- 0568US8442300B2Specified position identifying method and specified position measuring apparatusTSUNETA RURIKO·Filed 2007·Granted May 14, 2013·6 cites·9 claims
- 0661US9099281B2Charged particle radiation apparatus, and method for displaying three-dimensional information in charged particle radiation apparatusYAGUCHI TOSHIE·Filed 2010·Granted Aug 4, 2015·1 cites·28 claims
- 0755US12198892B2Sample holder and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Jan 14, 2025·0 cites·15 claims
- 0850US8399863B2Charged particle beam apparatus using an electrostatic lens gunKAGA HIROYASU·Filed 2009·Granted Mar 19, 2013·0 cites·5 claims
- 0941US11600463B2Cross-section observation device, and control methodHITACHI HIGH TECH SCIENCE CORP·Filed 2018·Granted Mar 7, 2023·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →