Inventor · disambiguated record
Tetsuji Kiyota
Also filed as: KIYOTA TETSUJI
2 granted patents·1 pending application·119 citations·filing 1996–2013
69Inventor score
Technology areasC23C
Top patents by PatentIndex Score
3 records- 0182US6280585B1Sputtering apparatus for filling pores of a circular substrateULVAC INC·Filed 1997·Granted Aug 28, 2001·71 cites·2 claims
- 0273US5770025AMagnetron sputtering apparatusULVAC CORP·Filed 1996·Granted Jun 23, 1998·48 cites·3 claims
- 0347US2013186340A1Vacuum Film Forming ApparatusULVAC INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →