Inventor · disambiguated record
Sang-Yoon Soh
Also filed as: SOH SANG YOON
7 granted patents·3 pending applications·361 citations·filing 2005–2019
82Inventor score
Top patents by PatentIndex Score
10 records- 0197US10474184B2Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Nov 12, 2019·39 cites·19 claims
- 0294US9812372B2Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuckSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 7, 2017·319 cites·20 claims
- 0371US9306488B2Dual inverter system and method of controlling the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 5, 2016·3 cites·15 claims
- 0452US2010289789A1Plasma display deviceLG ELECTRONICS INC·Filed 2008·Application pending·0 cites
- 0551US10627206B2Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Apr 21, 2020·0 cites·19 claims
- 0651US2010128013A1Plasma display deviceLG ELECTRONICS INC·Filed 2009·Application pending·0 cites
- 0749US7692608B2Energy recovery circuit and energy recovering method using the sameLG ELECTRONICS INC·Filed 2005·Granted Apr 6, 2010·0 cites·13 claims
- 0844US9843284B2System for controlling fault toleranceSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Dec 12, 2017·0 cites·18 claims
- 0940US10281520B2Diagnosing an abnormal state of a substrate-processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted May 7, 2019·0 cites·8 claims
- 1038US2020168478A1Chemical liquid supply apparatus and semiconductor processing apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Sang-Yoon Soh files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →