Inventor · disambiguated record
Hyeokjin Jang
Also filed as: JANG HYEOKJIN
2 granted patents·7 citations·filing 2010–2010
49Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0171US8398783B2Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the sameLEE BYOUNGIL·Filed 2010·Granted Mar 19, 2013·6 cites·10 claims
- 0248US8323522B2Plasma reactor and etching method using the sameJANG HYEOKJIN·Filed 2010·Granted Dec 4, 2012·1 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →