Inventor · disambiguated record

Shizuo Ogawa

Also filed as: OGAWA SHIZUO

3 granted patents·156 citations·filing 1995–1999

76Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD3

Top patents by PatentIndex Score

3 records

0186US5803932AResist processing apparatus having an interface section including two stacked substrate waiting tablesTOKYO ELECTRON LTD·Filed 1995·Granted Sep 8, 1998·84 cites·18 claims
0280US5980591ASystem for processing a plurality of objects contained in a plurality of cassettesTOKYO ELECTRON LTD·Filed 1997·Granted Nov 9, 1999·56 cites·33 claims
0349US6673155B2Apparatus for forming coating film and apparatus for curing the coating filmTOKYO ELECTRON LTD·Filed 1999·Granted Jan 6, 2004·16 cites·18 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →