Inventor · disambiguated record
Wataru Yano
Also filed as: YANO WATARU
4 granted patents·2 pending applications·28 citations·filing 1995–2024
64Inventor score
Top patents by PatentIndex Score
6 records- 0163US12417930B2Substrate treating method and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2024·Granted Sep 16, 2025·0 cites·6 claims
- 0254US2024253180A1Substrate holding device and substrate treating apparatus provided therewithSCREEN HOLDINGS CO LTD·Filed 2024·Application pending·0 cites
- 0353US2024253182A1Method for conditioning polishing tool, substrate processing method, and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2024·Application pending·0 cites
- 0452US5648829AMethod for fabricating a liquid crystal display including irradiating an alignment film with UV lightKYOCERA CORP·Filed 1995·Granted Jul 15, 1997·28 cites·2 claims
- 0543US10892174B2Substrate cleaning brush and substrate cleaning apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jan 12, 2021·0 cites·14 claims
- 0637US10821483B2Substrate treatment apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Nov 3, 2020·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →