Inventor · disambiguated record
Tetsuo Ookawa
Also filed as: OOKAWA TETSUO
3 granted patents·13 citations·filing 1997–2002
67Inventor score
Technology areasH10P
Files withHITACHI LTD3
Top patents by PatentIndex Score
3 records- 0162US6576552B2Method for polishing semiconductor deviceHITACHI LTD·Filed 2002·Granted Jun 10, 2003·7 cites·7 claims
- 0254US6489243B2Method for polishing semiconductor deviceHITACHI LTD·Filed 2002·Granted Dec 3, 2002·4 cites·6 claims
- 0330US6420265B1Method for polishing semiconductor deviceHITACHI LTD·Filed 1997·Granted Jul 16, 2002·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →