Inventor · disambiguated record
Chun-Lang Chen
Also filed as: CHEN CHUN-LANG
48 granted patents·8 pending applications·184 citations·filing 1993–2025
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD39TAIWAN SEMICONDUCTOR MFG6TU CHIH-CHIANG6CHEN CHUN-LANG1WU HSIANG-CHEN1
Top patents by PatentIndex Score
56 records- 0196US11735421B2Reflection mode photomask and method of makingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 22, 2023·2 cites·20 claims
- 0296US8715890B2Semiconductor mask blanks with a compatible stop layerTU CHIH-CHIANG·Filed 2012·Granted May 6, 2014·87 cites·10 claims
- 0395US11270884B2Reflection mode photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 8, 2022·3 cites·19 claims
- 0488US10095102B2Photomask having a plurality of shielding layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 9, 2018·2 cites·20 claims
- 0588US9953833B2Semiconductor mask blanks with a compatible stop layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 24, 2018·4 cites·20 claims
- 0688US8563351B2Method for manufacturing photovoltaic deviceTU CHIH-CHIANG·Filed 2010·Granted Oct 22, 2013·5 cites·20 claims
- 0787US10553428B2Reflection mode photomask and fabrication method thereforeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Feb 4, 2020·3 cites·14 claims
- 0886US10845698B2Mask, method of forming the same and method of manufacturing a semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 24, 2020·3 cites·20 claims
- 0986US2025355339A1Extreme Ultraviolet (EUV) Mask and Method of Fabrication ThereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1085US12176211B2Reflection mode photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 24, 2024·0 cites·20 claims
- 1185US10276426B2System and method for performing spin dry etchingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 30, 2019·3 cites·20 claims
- 1285US9581894B2Image mask film scheme and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 28, 2017·2 cites·20 claims
- 1384US11662656B2Mask and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 30, 2023·1 cites·20 claims
- 1482US8981557B2Method for forming photovoltaic cell, and resulting photovoltaic cellTU CHIH-CHIANG·Filed 2012·Granted Mar 17, 2015·2 cites·11 claims
- 1581US12066757B2Mask and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 20, 2024·0 cites·20 claims
- 1681US2024377722A1Mask and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1780US9122175B2Image mask film scheme and methodTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Sep 1, 2015·2 cites·20 claims
- 1878US11531263B2Photomask having a plurality of shielding layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 1978US8882304B2Illuminating device and packaging method thereofWU HSIANG-CHEN·Filed 2010·Granted Nov 11, 2014·7 cites·21 claims
- 2078US2025085622A1Extreme Ultraviolet (EUV) Mask and Method of Fabrication ThereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2177US10698313B2Apparatus and method for developing a photoresist coated substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 30, 2020·1 cites·20 claims
- 2277US9921467B2Mask blank and mask and fabrication method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 20, 2018·2 cites·20 claims
- 2377US9017903B2Mask overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 28, 2015·2 cites·20 claims
- 2477US8293645B2Method for forming photovoltaic cellTU CHIH-CHIANG·Filed 2010·Granted Oct 23, 2012·1 cites·20 claims
- 2576US9373551B2Moveable and adjustable gas injectors for an etching chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 21, 2016·3 cites·19 claims
- 2676US8999611B2Mask blank for scattering effect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 7, 2015·2 cites·20 claims
- 2774US11099476B2Photomask having a plurality of shielding layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 24, 2021·0 cites·20 claims
- 2872US10007176B2Graphene pellicle for extreme ultraviolet lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jun 26, 2018·1 cites·20 claims
- 2970US9202947B2Photovoltaic deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 1, 2015·0 cites·22 claims
- 3070US9142423B2Semiconductor mask blanks with a compatible stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Sep 22, 2015·1 cites·20 claims
- 3169US9377701B2Mask overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 28, 2016·1 cites·20 claims
- 3268US9829786B2PSM blank for enhancing small size CD resolutionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 28, 2017·1 cites·13 claims
- 3367US10969682B2Apparatus and method for developing a photoresist coated substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 6, 2021·0 cites·20 claims
- 3467US10670956B2Photomask having a plurality of shielding layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 2, 2020·0 cites·20 claims
- 3566US10852634B2Phase shifter maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 1, 2020·0 cites·20 claims
- 3664US5983747AAuxiliary handlebar of bicycleYU CHUAN YEN·Filed 1998·Granted Nov 16, 1999·34 cites·7 claims
- 3762US7043327B2Lithography apparatus and method employing non-environmental variable correctionTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted May 9, 2006·6 cites·20 claims
- 3861US10678126B2Semiconductor mask blanks with a compatible stop layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 9, 2020·0 cites·20 claims
- 3960US10156783B2Image mask film scheme and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 18, 2018·0 cites·20 claims
- 4059US9513542B2Lithography mask and method of forming a lithography maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 6, 2016·0 cites·20 claims
- 4159US9057961B2Systems and methods for lithography masksTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jun 16, 2015·0 cites·20 claims
- 4259US2024053668A1Photomask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 4358US10345692B2Photomask and a fabrication method thereforTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jul 9, 2019·0 cites·20 claims
- 4457US11854861B2System and method for performing spin dry etchingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 26, 2023·0 cites·20 claims
- 4556US10012899B2Graphene pellicle for extreme ultraviolet lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 3, 2018·0 cites·20 claims
- 4656US8785083B2Systems and methods for lithography masksTU CHIH-CHIANG·Filed 2012·Granted Jul 22, 2014·0 cites·9 claims
- 4754US2024053674A1Photomask structure and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 4851US10157805B2Moveable and adjustable gas injectors for an etching chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 18, 2018·0 cites·20 claims
- 4950US2012021555A1Photovoltaic cell texturizationTU CHIH-CHIANG·Filed 2010·Application pending·0 cites
- 5049US7871742B2Method for controlling phase angle of a mask by post-treatmentTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jan 18, 2011·0 cites·14 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →