Inventor · disambiguated record
Yevgeniy Konstantinovich Shmarev
Also filed as: SHMAREV YEVGENIY · SHMAREV YEVGENIY KONSTANTINOVI · SHMAREV YEVGENIY KONSTANTINOVICH
22 granted patents·5 pending applications·56 citations·filing 2005–2022
93Inventor score
Files withASML HOLDING NV10ASML NETHERLANDS BV5SHMAREV YEVGENIY KONSTANTINOVICH3SMIRNOV STANISLAV Y2VISSER HUIBERT2
Top patents by PatentIndex Score
27 records- 0191US10107761B2Method and device for focusing in an inspection systemASML NETHERLANDS BV·Filed 2016·Granted Oct 23, 2018·5 cites·22 claims
- 0287US7589832B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device methodASML NETHERLANDS BV·Filed 2006·Granted Sep 15, 2009·15 cites·8 claims
- 0381US7633689B2Catadioptric optical system for scatterometryASML HOLDING NV·Filed 2007·Granted Dec 15, 2009·11 cites·17 claims
- 0477US8164740B2Illumination system coherence remover with two sets of stepped mirrorsVISSER HUIBERT·Filed 2008·Granted Apr 24, 2012·4 cites·14 claims
- 0575US8189203B2Reticle inspection systems and methodSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2009·Granted May 29, 2012·7 cites·20 claims
- 0674US10724961B2Method and device for focusing in an inspection systemASML HOLDING NV·Filed 2017·Granted Jul 28, 2020·1 cites·26 claims
- 0773US9904173B2Method and apparatuses for optical pupil symmetrizationASML HOLDING NV·Filed 2015·Granted Feb 27, 2018·1 cites·30 claims
- 0873US9285687B2Inspection apparatus, lithographic apparatus, and device manufacturing methodSMIRNOV STANISLAV Y·Filed 2012·Granted Mar 15, 2016·2 cites·21 claims
- 0973US8982481B2Catadioptric objective for scatterometryASML HOLDING NV·Filed 2012·Granted Mar 17, 2015·2 cites·17 claims
- 1071US8120001B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2009·Granted Feb 21, 2012·2 cites·6 claims
- 1168US11126007B2Beam splitting prism systemsASML HOLDING NV·Filed 2020·Granted Sep 21, 2021·0 cites·20 claims
- 1268US9046754B2EUV mask inspection systemSEWELL HARRY·Filed 2009·Granted Jun 2, 2015·2 cites·14 claims
- 1368US7630136B2Optical integrators for lithography systems and methodsASML HOLDING NV·Filed 2006·Granted Dec 8, 2009·3 cites·24 claims
- 1461US12140872B2Optical designs of miniaturized overlay measurement systemASML HOLDING NV·Filed 2021·Granted Nov 12, 2024·0 cites·15 claims
- 1561US10747010B2Beam splitting prism systemsASML HOLDING NV·Filed 2018·Granted Aug 18, 2020·0 cites·16 claims
- 1661US8934084B2System and method for printing interference patterns having a pitch in a lithography systemSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2006·Granted Jan 13, 2015·1 cites·20 claims
- 1759US10048591B2Catadioptric illumination system for metrologyASML HOLDING NV·Filed 2015·Granted Aug 14, 2018·0 cites·20 claims
- 1858US2024302164A1Optical element for use in metrology systemsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1955US8159651B2Illumination system coherence remover with a series of partially reflective surfacesVISSER HUIBERT·Filed 2008·Granted Apr 17, 2012·0 cites·10 claims
- 2053US2007247606A1Illumination systemASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 2152US10866526B2Metrology method and deviceSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2018·Granted Dec 15, 2020·0 cites·22 claims
- 2252US9069260B2Catadioptric illumination system for metrologySMIRNOV STANISLAV Y·Filed 2011·Granted Jun 30, 2015·0 cites·20 claims
- 2346US2007127005A1Illumination systemASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 2444US10754259B2Method and device for pupil illumination in overlay and critical dimension sensorsASML HOLDING NV·Filed 2017·Granted Aug 25, 2020·0 cites·24 claims
- 2539US2012081684A1Object Inspection Systems and MethodsDEN OEF ARIE JEFFREY·Filed 2010·Application pending·0 cites
- 2637US2012281197A1Holographic Mask Inspection System with Spatial FilterTHARALDSEN ROBERT ALBERT·Filed 2010·Application pending·0 cites
- 2734US8623576B2Time differential reticle inspectionCATEY ERIC BRIAN·Filed 2010·Granted Jan 7, 2014·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →