Inventor · disambiguated record
Keh-Wen Chang
Also filed as: CHANG KEH-WEN
4 granted patents·10 citations·filing 2007–2019
66Inventor score
Top patents by PatentIndex Score
4 records- 0180US7564556B2Method and apparatus for lens contamination controlTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jul 21, 2009·8 cites·19 claims
- 0265US8683395B2Method and system for feed-forward advanced process controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 25, 2014·1 cites·19 claims
- 0358US8429569B2Method and system for feed-forward advanced process controlYU CHIH-JEN·Filed 2011·Granted Apr 23, 2013·1 cites·17 claims
- 0451US11081365B2Treatment to interface between metal film and BARC or photoresistTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 3, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →