Inventor · disambiguated record
Jack S. Kasahara
Also filed as: KASAHARA JACK S
3 granted patents·1 pending application·108 citations·filing 1999–2003
75Inventor score
Technology areasH10P
Files withFSI INT INC3
Top patents by PatentIndex Score
4 records- 0184US6307184B1Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 1999·Granted Oct 23, 2001·71 cites·29 claims
- 0281US6423947B2Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 2001·Granted Jul 23, 2002·27 cites·6 claims
- 0366US6838115B2Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devicesFSI INT INC·Filed 2001·Granted Jan 4, 2005·10 cites·39 claims
- 0439US2004047993A1Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devicesFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →